◈ Function

  • Measure roughness of sample surface

◈ Specifications  

  • pressure : 0.75mN

  • range : X-axis 100mm, Z-axis 800㎛

  • angle range : ±45°

  • standard stylus : 60° R2um(diamond)

  • accuracy(X-axis) : (0.05+0.001L)㎛

  • straightness : 0.15㎛ /100mm

  • Parameter

    - Pa, Pq, Psk, Pku, Pp, Pv, Pz, Pt, Pc, PSm, PΔq, Pmr（c）, Pmr, Pδc, Ra, Rq, Rsk, Rku, Rp, Rv, Rz, Rt, Rc,

       RSm, RΔq, Rmr（c）, Rmr, Rδc, Wa, Wq, Wsk, Wku, Wp, Wv, Wz, Wt,Wc, WSm, WΔq, Wmr（c）, Wmr, 

       Wδc, Rk, Rpk, Rvk, Mr1, Mr2, A1, A2, Rx, AR, R, Wx, AW, W, Wte, Ry, RyDIN, RzDIN, R3y, R3z, S, HSC, 

       Lo, lr, Δa, λa, λq, Vo, Htp, NR, NCRX, CPM, SR, SAR, NW, SW, SAW