◈ Specification

· DIMENSION ≒425D * 874W * 754H
· Max.Temp. Zone 1/2/3 각 1700℃
·Working Temp. Zone 1/2/3 각 1600℃
· Heating zone 120mm*3(3Zone)
· Al2O3 Tube Φ80*Φ70*1000Lmm
· Heating Element MoSi2 (U-type) KANTHAL SUPER(SWEDEN)
· Temp. Controller PID Programmable Control
· Thermocouple B- Type
· Electric  AC 220V , 1Φ,  4.0 KW
· Weight ≒190kg
· Vacuum pump Rotary type 5*10-4,200L/min
· MFC Ar,H2,O2 / Flow rate : 100sccm
· MFC Controller 4 chanel MFC Flow control
· Gas Inlet heating coil Max Temp. 200℃
· HEPA filter Glass fiber 99.7%