◈ Function

1. Main Processing Vacuum Chamber
2. Loadlock Chamber / Loading Unit
3. Vacuum Pumping System
4. Magnetron Sputtering Source
5. Substrate Rotation / Z-Motion / Heating Module
6. RF / DC Power Supply
7. Gas Supply System / Gauge Unit
8. System Frame / Controller / Utilities
9. Delivery / Warranty / Spare Parts / Etc.
10. System Performance / Specification

◈ Specifications

1. Main Processing Vacuum Chamber ------------------------------------- 1 SET
1.1 Material : SUS 304L
1.2 Dimension : About Φ500, 400(H) [실제작시 변경 가능]
1.3 Functional Ports
① ID6" Fore-line Pumping
② CF4.5" Sputter Source Flange
③ I.D Φ100 Sight View with Shutter
④ CF8" Heater Mounting Flange
⑤ CF2.75" Gauge & Spare
⑥ Gas Inlet & Venting
⑦ Rough-Pumping
⑧ ID 1" Pneumatic Shutter Port
⑨ Gate Valve Flange
1.4 Chamber Stainless Steel Shields Glass Bead Blasted for Coating Protection
1.5 All of Stainless Steel Electro-Polished
2. Loadlock Chamber / Loading Unit ------------------------------------- 1 SET
2.1 Material : Aluminum
2.2 Dimension : About 350⍉, 400(H)
2.3 Functional Ports
① Sight View Port ② Rough Pumping Port
⑨ Gate Valve Flange