PVD for formation of seed layer
◈Substrate(Size & Capacity) : 6 inch, 1 Substrate
◈Vacuum(Ultimate Pressure) : ≤１×10-6 Torr
◈Uniformity(Thickness Uniformity) : ≤±5%@20,000Å(ZnO) within 6 inch PET film
◈Substrate(Size & Capacity) : 6 inch, 1 Substrate
◈Vacuum(Ultimate Pressure) : ≤１×10-6 Torr
◈Uniformity(Thickness Uniformity) : ≤±5%@20,000Å(ZnO) within 6 inch PET film